Bastian Keller

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Sontheim, DE

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Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR MEASURING ACTUATORS IN A PROJECTION EXPOSURE...
- Publication number 20230228798
- Publication date Jul 20, 2023
- Carl Zeiss SMT GMBH
- Markus Raab
- G01 - MEASURING TESTING