Bastian Trauter

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for adjusting an optical system of a microlithographic proje...
- Patent number 9,140,994
- Issue date Sep 22, 2015
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ADJUSTING AN OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJE...
- Publication number 20140362362
- Publication date Dec 11, 2014
- Ingo Saenger
- G02 - OPTICS