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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic method
Patent number
11,644,755
Issue date
May 9, 2023
ASML Netherland B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic process and apparatus and inspection process and appar...
Patent number
11,599,027
Issue date
Mar 7, 2023
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
11,237,490
Issue date
Feb 1, 2022
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic process and apparatus and inspection process and appar...
Patent number
11,199,782
Issue date
Dec 14, 2021
ASML Netherlands B.V.
Wim Tjibbo Tel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,705,438
Issue date
Jul 7, 2020
ASML Netherlands B.V.
Andre Bernardus Jeunink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method
Patent number
10,571,814
Issue date
Feb 25, 2020
ASML Netherlands B.V.
Andre Bernardus Jeunink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Estimating deformation of a patterning device and/or a change in it...
Patent number
9,857,694
Issue date
Jan 2, 2018
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and method of...
Patent number
9,658,541
Issue date
May 23, 2017
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information
Patent Grant
Lithographic apparatus configured to reconstruct an aerial pattern...
Patent number
9,329,500
Issue date
May 3, 2016
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,116,446
Issue date
Aug 25, 2015
ASML Netherlands B.V.
Robbert Jan Voogd
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device and method for transmission image sensing
Patent number
9,036,130
Issue date
May 19, 2015
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image sensor, lithographic apparatus comprising an image sensor and...
Patent number
8,975,599
Issue date
Mar 10, 2015
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus, device manufacturing methods and...
Patent number
8,896,817
Issue date
Nov 25, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, computer program product and device manufac...
Patent number
8,860,928
Issue date
Oct 14, 2014
ASML Netherlands B.V.
Sytse Postma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method of applying...
Patent number
8,773,637
Issue date
Jul 8, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and sensor therefor
Patent number
8,629,418
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method of irradiating at least two targe...
Patent number
8,436,984
Issue date
May 7, 2013
ASML Netherlands B.V.
Cornelis Lambertus Maria Van Weert
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation detector, method of manufacturing a radiation detector, a...
Patent number
8,426,831
Issue date
Apr 23, 2013
ASML Netherlands B.V.
Stoyan Nihtianov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation detector, method of manufacturing a radiation detector, a...
Patent number
8,324,598
Issue date
Dec 4, 2012
ASML Netherlands B.V.
Stoyan Nihtianov
Information
Patent Grant
Radiation detector, method of manufacturing a radiation detector, a...
Patent number
8,138,485
Issue date
Mar 20, 2012
ASML Netherlands B.V.
Stoyan Nihtianov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device and method for transmission image sensing
Patent number
7,675,605
Issue date
Mar 9, 2010
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,655,367
Issue date
Feb 2, 2010
ASML Netherlands B.V.
Erik Petrus Buurman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation detector, method of manufacturing a radiation detector an...
Patent number
7,586,108
Issue date
Sep 8, 2009
ASML Netherlands B.V.
Stoyan Nihtianov
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Reduction of fit error due to non-uniform sample distribution
Patent number
7,583,359
Issue date
Sep 1, 2009
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,525,638
Issue date
Apr 28, 2009
ASML Netherlands B.V.
Erik Petrus Buurman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,453,078
Issue date
Nov 18, 2008
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,282,701
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,145,630
Issue date
Dec 5, 2006
ASML Netherlands B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS
Publication number
20250021017
Publication date
Jan 16, 2025
ASML NETHERLANDS B.V.
Raaja Ganapathy SUBRAMANIAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR CONDITIONING OPTICAL APPARATUSES
Publication number
20230251583
Publication date
Aug 10, 2023
ASML NETHERLANDS B.V.
Oleg Viacheslavovich VOZNYI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT SYSTEM AND METHOD FOR CHARACTERIZING A PATTERNING DEVICE
Publication number
20220373894
Publication date
Nov 24, 2022
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS
Publication number
20220057719
Publication date
Feb 24, 2022
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20210389676
Publication date
Dec 16, 2021
ASML NETHERLANDS B.V.
Bearrach MOEST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC PROCESS & APPARATUS AND INSPECTION PROCESS AND APPARATUS
Publication number
20210208511
Publication date
Jul 8, 2021
ASML NETHERLANDS B.V.
Wim Tjibbo TEL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC METHOD
Publication number
20200117097
Publication date
Apr 16, 2020
ASML NETHERLANDS B.V.
Andre Bernardus JEUNINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190079420
Publication date
Mar 14, 2019
ASML NETHERLANDS B.V.
Bearrach MOEST
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Estimating Deformation of a Patterning Device and/or a Change in It...
Publication number
20170068171
Publication date
Mar 9, 2017
ASML NETHERLANDS B.V.
Bearrach MOEST
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...
Publication number
20140313500
Publication date
Oct 23, 2014
Marcus Adrianus VAN DE KERKHOF
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information
Patent Application
Radiation Detector, Method of Manufacturing a Radiation Detector, a...
Publication number
20120268722
Publication date
Oct 25, 2012
ASML NETHERLANDS B.V.
Stoyan NIHTIANOV
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20120242967
Publication date
Sep 27, 2012
ASML NETHERLANDS B.V.
Robbert Jan Voogd
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, COMPUTER PROGRAM PRODUCT AND DEVICE MANUFAC...
Publication number
20120019795
Publication date
Jan 26, 2012
ASML NETHERLANDS B.V.
Sytse POSTMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF...
Publication number
20110090476
Publication date
Apr 21, 2011
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
B21 - MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL PUNCHING...
Information
Patent Application
Image Sensor, Method for Image Detection and Computer Program Product
Publication number
20100195071
Publication date
Aug 5, 2010
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF IRRADIATING AT LEAST TWO TARGE...
Publication number
20100157271
Publication date
Jun 24, 2010
ASML NETHERLANDS B.V.
Cornelis Lambertus Maria VAN WEERT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and Method for Transmission Image Sensing
Publication number
20100141920
Publication date
Jun 10, 2010
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100091260
Publication date
Apr 15, 2010
ASML NETHERLANDS B.V.
Erik Petrus Buurman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Detector, Method of Manufacturing a Radiation Detector, a...
Publication number
20090021717
Publication date
Jan 22, 2009
ASML NETHERLANDS B.V.
Stoyan Nihtianov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and method for transmission image detection, lithographic ap...
Publication number
20090002656
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device and method for transmission image sensing
Publication number
20090002710
Publication date
Jan 1, 2009
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation detector, method of manufacturing a radiation detector an...
Publication number
20080315121
Publication date
Dec 25, 2008
ASML NETHERLANDS B.V.
Stoyan Nihtianov
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Image sensor, lithographic apparatus comprising an image sensor and...
Publication number
20080273183
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20080007844
Publication date
Jan 10, 2008
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reduction of fit error due to non-uniform sample distribution
Publication number
20070258074
Publication date
Nov 8, 2007
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of measuring the magnification of a projection system, devic...
Publication number
20070159622
Publication date
Jul 12, 2007
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of measuring the magnification of a projection system, devic...
Publication number
20070115452
Publication date
May 24, 2007
ASML NETHERLANDS B.V.
Bearrach Moest
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20070108377
Publication date
May 17, 2007
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing methods and...
Publication number
20070091290
Publication date
Apr 26, 2007
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic projection apparatus, device manufacturing methods and...
Publication number
20070081138
Publication date
Apr 12, 2007
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY