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Beibei Jiang
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Fremont, CA, US
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last 30 patents
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Patent Application
METHOD TO CONTROL ETCH PROFILE BY RF PULSING
Publication number
20250095964
Publication date
Mar 20, 2025
LAM RESEARCH CORPORATION
Daksh AGARWAL
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
CONTROL OF MASK CD
Publication number
20230230807
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Beibei Jiang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STATE RF PULSING TO CONTROL MASK SHAPE AND BREAKING SELECTIVI...
Publication number
20220285130
Publication date
Sep 8, 2022
LAM RESEARCH CORPORATION
Nikhil Dole
H01 - BASIC ELECTRIC ELEMENTS