Ben BANNEY

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Augsburg, DE

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Patents Grantslast 30 patents

Information Patent Grant
Protection module for EUV lithography apparatus, and EUV lithograph...
- Patent number 8,698,999
- Issue date Apr 15, 2014
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROTECTION MODULE FOR EUV LITHOGRAPHY APPARATUS, AND EUV LITHOGRAPH...
- Publication number 20110216298
- Publication date Sep 8, 2011
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY