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Patent Grant
Thicker oxide formation at the trench bottom by selective oxide dep...
Patent number
6,709,930
Issue date
Mar 23, 2004
Siliconix Incorporated
Ben Chan
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
THICKER OXIDE FORMATION AT THE TRENCH BOTTOM BY SELECTIVE OXIDE DEP...
Publication number
20030235958
Publication date
Dec 25, 2003
Siliconix Incorporated
Ben Chan
H01 - BASIC ELECTRIC ELEMENTS