Ben Liu

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Hsin-chu, TW

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Patents Grantslast 30 patents

Information Patent Grant
High-pressure pad cleaning system
- Patent number 6,764,388
- Issue date Jul 20, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ying-Chih Liu
- B24 - GRINDING POLISHING
Information Patent Grant
Self-cleaning slurry arm on a CMP tool
- Patent number 6,506,098
- Issue date Jan 14, 2003
- Taiwan Semiconductor Manufacturing Company
- Hu Fu Dao Ho
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
High-pressure pad cleaning system
- Publication number 20030211816
- Publication date Nov 13, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Chih Liu
- B24 - GRINDING POLISHING