Ben Pang

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Oakland, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning an exhaust line in a semiconducto...
- Patent number 6,689,930
- Issue date Feb 10, 2004
- Applied Materials Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for cleaning an exhaust line in a semiconductor processin...
- Patent number 6,680,420
- Issue date Jan 20, 2004
- Applied Materials Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Parallel plate apparatus for in-situ vacuum line cleaning for subst...
- Patent number 6,193,802
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a vacuum line in a CVD system
- Patent number 6,194,628
- Issue date Feb 27, 2001
- Applied Materials, Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for cleaning a vacuum line in a CVD system
- Publication number 20010016674
- Publication date Aug 23, 2001
- Applied Materials , Inc.
- Ben Pang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...