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Ben Smedley
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San Luis Obispo, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Systems and methods of processing substrates
Patent number
9,393,669
Issue date
Jul 19, 2016
Strasbaugh
William J. Kalenian
B24 - GRINDING POLISHING
Information
Patent Grant
System and method for in situ monitoring of top wafer thickness in...
Patent number
8,520,222
Issue date
Aug 27, 2013
Strasbaugh
Frederic Anthony Schraub
G01 - MEASURING TESTING
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
7,083,497
Issue date
Aug 1, 2006
Strasbaugh, Inc.
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
6,986,701
Issue date
Jan 17, 2006
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad with built-in optical sensor
Patent number
6,739,945
Issue date
May 25, 2004
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SYSTEMS AND METHODS OF PROCESSING SUBSTRATES
Publication number
20130130593
Publication date
May 23, 2013
Strasbaugh
William J. Kalenian
B24 - GRINDING POLISHING
Information
Patent Application
System and Method for In Situ Monitoring of Top Wafer Thickness in...
Publication number
20130114090
Publication date
May 9, 2013
Strasbaugh
Frederic Anthony Schraub
G01 - MEASURING TESTING
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20070032170
Publication date
Feb 8, 2007
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING PAD WITH BUILT-IN OPTICAL SENSOR
Publication number
20060116051
Publication date
Jun 1, 2006
Strasbaugh, Inc.
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20050009449
Publication date
Jan 13, 2005
Strasbaugh
David G. Halley
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad with built-in optical sensor
Publication number
20020090887
Publication date
Jul 11, 2002
David G. Halley
B24 - GRINDING POLISHING