Ben Tsai

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and methods for optically monitoring the fidelity of patt...
- Patent number 7,557,921
- Issue date Jul 7, 2009
- KLA-Tencor Technologies Corporation
- Michael E. Adel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Overlay error detection
- Patent number 7,375,810
- Issue date May 20, 2008
- KLA-Tencor Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Overlay error detection
- Patent number 7,009,704
- Issue date Mar 7, 2006
- KLA-Tencor Technologies Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Overlay error detection
- Publication number 20060098199
- Publication date May 11, 2006
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING