Ben Ward Hertzler

Person

  • Los Gatos, CA, US

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING PROCESSES USED IN MEMS PRODUCTION

    • Publication number 20090071933
    • Publication date Mar 19, 2009
    • QUALCOMM MEMS TECHNOLOGIES, INC.
    • Philip Floyd
    • B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL