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Ben (Wen-Pin) Chuang
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Hsinchu, TW
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Patents Grants
last 30 patents
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Patent Grant
Method of fabricating MEMS devices using plasma etching and device...
Patent number
10,913,653
Issue date
Feb 9, 2021
MCube Inc.
Ben (Wen-Pin) Chuang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHOD OF FABRICATING MEMS DEVICES USING PLASMA ETCHING AND DEVICE...
Publication number
20160257559
Publication date
Sep 8, 2016
MCube Inc.
Ben (Wen-Pin) Chuang
B81 - MICRO-STRUCTURAL TECHNOLOGY