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Benedict W. Pang
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Burlingame, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Controlling chemical mechanical polishing pad stiffness by adjustin...
Patent number
12,257,664
Issue date
Mar 25, 2025
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Grant
Face-up wafer electrochemical planarization apparatus
Patent number
12,090,600
Issue date
Sep 17, 2024
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20250001547
Publication date
Jan 2, 2025
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
FACE-UP WAFER ELECTROCHEMICAL PLANARIZATION APPARATUS
Publication number
20230390887
Publication date
Dec 7, 2023
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
FACE-UP WAFER EDGE POLISHING APPARATUS
Publication number
20230024009
Publication date
Jan 26, 2023
Applied Materials, Inc.
Kevin H. Song
B24 - GRINDING POLISHING
Information
Patent Application
Controlling Chemical Mechanical Polishing Pad Stiffness By Adjustin...
Publication number
20200276685
Publication date
Sep 3, 2020
Kevin H. Song
B24 - GRINDING POLISHING