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Benjahman Julius Modeste
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Elchingen, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for maintaining a projection exposure apparatus, service mod...
Patent number
12,332,576
Issue date
Jun 17, 2025
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stop, optical system and lithography apparatus
Patent number
12,222,655
Issue date
Feb 11, 2025
Carl Zeiss SMT GmbH
Benjahman Julius Modeste
G02 - OPTICS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR MAINTAINING A PROJECTION EXPOSURE APPARATUS, SERVICE MOD...
Publication number
20230072843
Publication date
Mar 9, 2023
Carl Zeiss SMT GMBH
Dirk Heinrich Ehm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Publication number
20220107567
Publication date
Apr 7, 2022
Carl Zeiss SMT GMBH
Benjahman Julius Modeste
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY