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Benjamin Cherian
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Training a machine learning system to detect an excursion of a CMP...
Patent number
12,148,149
Issue date
Nov 19, 2024
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Technique for training neural network for use in in-situ monitoring...
Patent number
12,136,574
Issue date
Nov 5, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Determination of substrate layer thickness with polishing pad wear...
Patent number
12,090,599
Issue date
Sep 17, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
Patent number
12,079,984
Issue date
Sep 3, 2024
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Trained neural network in in-situ monitoring during polishing and p...
Patent number
12,057,354
Issue date
Aug 6, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Training spectrum generation for machine learning system for spectr...
Patent number
12,020,159
Issue date
Jun 25, 2024
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Control of processing parameters during substrate polishing using e...
Patent number
11,969,854
Issue date
Apr 30, 2024
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Grant
Spectrographic monitoring using a neural network
Patent number
11,966,212
Issue date
Apr 23, 2024
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Control of processing parameters for substrate polishing with angul...
Patent number
11,931,853
Issue date
Mar 19, 2024
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Grant
Control of processing parameters during substrate polishing using c...
Patent number
11,919,121
Issue date
Mar 5, 2024
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Grant
Profile control with multiple instances of contol algorithm during...
Patent number
11,865,664
Issue date
Jan 9, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Temperature-based in-situ edge assymetry correction during CMP
Patent number
11,865,671
Issue date
Jan 9, 2024
Applied Materials, Inc.
Haosheng Wu
B24 - GRINDING POLISHING
Information
Patent Grant
Switching control algorithms on detection of exposure of underlying...
Patent number
11,850,699
Issue date
Dec 26, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Technique for training neural network for use in in-situ monitoring...
Patent number
11,791,224
Issue date
Oct 17, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Determination of substrate layer thickness with polishing pad wear...
Patent number
11,780,047
Issue date
Oct 10, 2023
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Grant
Machine learning systems for monitoring of semiconductor processing
Patent number
11,733,686
Issue date
Aug 22, 2023
Applied Materials, Inc.
Graham Yennie
B24 - GRINDING POLISHING
Information
Patent Grant
Monitoring of polishing pad texture in chemical mechanical polishing
Patent number
11,731,238
Issue date
Aug 22, 2023
Applied Materials, Inc.
Thomas H. Osterheld
B24 - GRINDING POLISHING
Information
Patent Grant
Detecting an excursion of a CMP component using time-based sequence...
Patent number
11,710,228
Issue date
Jul 25, 2023
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Temperature-based assymetry correction during CMP and nozzle for me...
Patent number
11,697,187
Issue date
Jul 11, 2023
Applied Materials, Inc.
Haosheng Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Using a trained neural network for use in in-situ monitoring during...
Patent number
11,658,078
Issue date
May 23, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Training spectrum generation for machine learning system for spectr...
Patent number
11,651,207
Issue date
May 16, 2023
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Machine vision as input to a CMP process control algorithm
Patent number
11,577,356
Issue date
Feb 14, 2023
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Training spectrum generation for machine learning system for spectr...
Patent number
11,507,824
Issue date
Nov 22, 2022
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polishing apparatus using neural network for monitoring
Patent number
10,994,389
Issue date
May 4, 2021
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Machine learning systems for monitoring of semiconductor processing
Patent number
10,969,773
Issue date
Apr 6, 2021
Applied Materials, Inc.
Graham Yennie
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Machine learning systems for monitoring of semiconductor processing
Patent number
10,795,346
Issue date
Oct 6, 2020
Applied Materials, Inc.
Graham Yennie
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Spectrographic monitoring using a neural network
Patent number
10,732,607
Issue date
Aug 4, 2020
Applied Materials, Inc.
Benjamin Cherian
G05 - CONTROLLING REGULATING
Information
Patent Grant
Acoustic emission monitoring and endpoint for chemical mechanical p...
Patent number
10,478,937
Issue date
Nov 19, 2019
Applied Materials, Inc.
Jianshe Tang
B24 - GRINDING POLISHING
Information
Patent Grant
Applying dimensional reduction to spectral data from polishing subs...
Patent number
10,086,492
Issue date
Oct 2, 2018
Applied Materials, Inc.
Jeffrey Drue David
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Applying dimensional reduction to spectral data from polishing subs...
Patent number
9,833,874
Issue date
Dec 5, 2017
Applied Materials, Inc.
Jeffrey Drue David
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
ACOUSTIC MONITORING FOR PROCESS RELIABILITY DURING POLISHING
Publication number
20250062163
Publication date
Feb 20, 2025
Applied Materials, Inc.
Nicholas A. Wiswell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
Publication number
20240378718
Publication date
Nov 14, 2024
Applied Materials, Inc.
Sidney P. Huey
B24 - GRINDING POLISHING
Information
Patent Application
CARRIER HEAD ACOUSTIC MONITORING WITH SENSOR IN PLATEN
Publication number
20240139905
Publication date
May 2, 2024
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Application
SWITCHING CONTROL ALGORITHMS ON DETECTION OF EXPOSURE OF UNDERLYING...
Publication number
20240116152
Publication date
Apr 11, 2024
Applied Materials, Inc.
Kun Xu
B24 - GRINDING POLISHING
Information
Patent Application
CONTROL OF PROCESSING PARAMETERS DURING SUBSTRATE POLISHING USING C...
Publication number
20240009796
Publication date
Jan 11, 2024
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Application
TECHNIQUE FOR TRAINING NEURAL NETWORK FOR USE IN IN-SITU MONITORING...
Publication number
20240014080
Publication date
Jan 11, 2024
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
WINDOW LOGIC FOR CONTROL OF POLISHING PROCESS
Publication number
20230415302
Publication date
Dec 28, 2023
Applied Materials, Inc.
Volker Geissler
B24 - GRINDING POLISHING
Information
Patent Application
DETERMINING SUBSTRATE ORIENTATION WITH ACOUSTIC SIGNALS
Publication number
20230390884
Publication date
Dec 7, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
MONITORING OF ACOUSTIC EVENTS ON A SUBSTRATE
Publication number
20230390886
Publication date
Dec 7, 2023
Applied Materials, Inc.
Upendra Ummethala
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC MONITORING OF CONDITIONER DURING POLISHING
Publication number
20230390891
Publication date
Dec 7, 2023
Applied Materials, Inc.
Thomas H. Osterheld
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC MONITORING OF CMP RETAINING RING
Publication number
20230390883
Publication date
Dec 7, 2023
Applied Materials, Inc.
Haoquan Fang
B24 - GRINDING POLISHING
Information
Patent Application
DETERMINING SUBSTRATE PRECESSION WITH ACOUSTIC SIGNALS
Publication number
20230390885
Publication date
Dec 7, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
DETERMINATION OF SUBSTRATE LAYER THICKNESS WITH POLISHING PAD WEAR...
Publication number
20230381912
Publication date
Nov 30, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MONITORING OF POLISHING PAD TEXTURE IN CHEMICAL MECHANICAL POLISHING
Publication number
20230321788
Publication date
Oct 12, 2023
Applied Materials, Inc.
Thomas H. Osterheld
B24 - GRINDING POLISHING
Information
Patent Application
TRAINING A MACHINE LEARNING SYSTEM TO DETECT AN EXCURSION OF A CMP...
Publication number
20230316502
Publication date
Oct 5, 2023
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRAINED NEURAL NETWORK IN IN-SITU MONITORING DURING POLISHING AND P...
Publication number
20230290691
Publication date
Sep 14, 2023
Applied Materials, Inc.
Kun Xu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Training Spectrum Generation for Machine Learning System for Spectr...
Publication number
20230267329
Publication date
Aug 24, 2023
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MACHINE VISION AS INPUT TO A CMP PROCESS CONTROL ALGORITHM
Publication number
20230182258
Publication date
Jun 15, 2023
Applied Materials, Inc.
Benjamin Cherian
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ACOUSTIC WINDOW IN PAD BACKING LAYER FOR CHEMICAL MECHANICAL POLISHING
Publication number
20230009737
Publication date
Jan 12, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
DETECTION OF PLANARIZATION FROM ACOUSTIC SIGNAL DURING CHEMICAL MEC...
Publication number
20230010025
Publication date
Jan 12, 2023
Applied Materials, Inc.
Thomas H. Osterheld
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC WINDOW WITH LIQUID-FILLED PORES FOR CHEMICAL MECHANICAL PO...
Publication number
20230011626
Publication date
Jan 12, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
COUPLING OF ACOUSTIC SENSOR FOR CHEMICAL MECHANICAL POLISHING
Publication number
20230009048
Publication date
Jan 12, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
ACOUSTIC WINDOW IN PAD POLISHING AND BACKING LAYER FOR CHEMICAL MEC...
Publication number
20230009519
Publication date
Jan 12, 2023
Applied Materials, Inc.
Nicholas A. Wiswell
B24 - GRINDING POLISHING
Information
Patent Application
FOURIER FILTERING OF SPECTRAL DATA FOR MEASURING LAYER THICKNESS DU...
Publication number
20220371152
Publication date
Nov 24, 2022
Applied Materials, Inc.
Benjamin Cherian
B24 - GRINDING POLISHING
Information
Patent Application
MONITOR CHEMICAL MECHANICAL POLISHING PROCESS USING MACHINE LEARNIN...
Publication number
20220347813
Publication date
Nov 3, 2022
Applied Materials, Inc.
Thomas H. Osterheld
B24 - GRINDING POLISHING
Information
Patent Application
IN-SITU MONITORING TO LABEL TRAINING SPECTRA FOR MACHINE LEARNING S...
Publication number
20220283082
Publication date
Sep 8, 2022
Applied Materials, Inc.
Thomas Li
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PRESSURE SIGNALS DURING MOTOR TORQUE MONITORING TO PROVIDE SPATIAL...
Publication number
20220281059
Publication date
Sep 8, 2022
Applied Materials, Inc.
Thomas Li
B24 - GRINDING POLISHING
Information
Patent Application
CONTROL OF PROCESSING PARAMETERS FOR SUBSTRATE POLISHING WITH SUBST...
Publication number
20220283554
Publication date
Sep 8, 2022
Applied Materials, Inc.
Eric Lau
B24 - GRINDING POLISHING
Information
Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
Publication number
20220284560
Publication date
Sep 8, 2022
Applied Materials, Inc.
Sidney P. Huey
B24 - GRINDING POLISHING
Information
Patent Application
DETECTING AN EXCURSION OF A CMP COMPONENT USING TIME-BASED SEQUENCE...
Publication number
20220284561
Publication date
Sep 8, 2022
Applied Materials, Inc.
Sidney P. Huey
G06 - COMPUTING CALCULATING COUNTING