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Benjamin Cunnegonda Henricus Smeets
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Weert, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus lithographic apparatus measurement method
Patent number
11,914,307
Issue date
Feb 27, 2024
ASML Netherlands B.V.
Bas Johannes Petrus Roset
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stage apparatus, lithographic apparatus, control unit and method
Patent number
11,243,476
Issue date
Feb 8, 2022
ASML Netherlands B.V.
Ringo Petrus Cornelis Van Dorst
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,551,746
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Benjamin Cunnegonda Henricus Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and control method
Patent number
8,570,490
Issue date
Oct 29, 2013
ASML Netherlands B.V.
Benjamin Cunnegonda Henricus Smeets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION APPARATUS LITHOGRAPHIC APPARATUS MEASUREMENT METHOD
Publication number
20220187719
Publication date
Jun 16, 2022
ASML NETHERLANDS B.V.
Bas Johannes Petrus ROSET
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Stage Apparatus, Lithographic Apparatus, Control Unit and Method
Publication number
20210116820
Publication date
Apr 22, 2021
ASML NETHERLANDS B.V.
Ringo Petrus Cornelis VAN DORST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180321593
Publication date
Nov 8, 2018
ASML NETHERLANDS B.V.
Benjamin Cunnegonda Henricus SMEETS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY