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Benjamin David DAWSON
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Trumbull, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, substrate table, and method
Patent number
11,988,971
Issue date
May 21, 2024
ASML Holding N.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LASER ROUGHENING: ENGINEERING THE ROUGHNESS OF THE BURL TOP
Publication number
20220134480
Publication date
May 5, 2022
ASML Holding N.V.
Damoon SOHRABIBABAHEIDARY
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND METHOD
Publication number
20220082953
Publication date
Mar 17, 2022
ASML Holding N.V.
Matthew LIPSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY