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Benjamin Goss
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Boulder, CO, US
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last 30 patents
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Patent Grant
Vapor delivery system
Patent number
6,895,178
Issue date
May 17, 2005
MKS Instruments, Inc.
Youfan Gu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
Vapor delivery system
Publication number
20030063901
Publication date
Apr 3, 2003
Youfan Gu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL