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Benjamin M. Rathsack
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Austin, TX, US
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last 30 patents
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Patent Grant
Substrate treatment to reduce pattern roughness
Patent number
8,449,293
Issue date
May 28, 2013
Tokyo Electron Limited
Benjamin M. Rathsack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of slimming radiation-sensitive material lines in lithograph...
Patent number
8,435,728
Issue date
May 7, 2013
Tokyo Electron Limited
Michael A. Carcasi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of slimming radiation-sensitive material lines in lithograph...
Patent number
8,338,086
Issue date
Dec 25, 2012
Tokyo Electron Limited
Michael A. Carcasi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATMENT TO REDUCE PATTERN ROUGHNESS
Publication number
20110269078
Publication date
Nov 3, 2011
TOKYO ELECTRON LIMITED
Benjamin M. Rathsack
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF SLIMMING RADIATION-SENSITIVE MATERIAL LINES IN LITHOGRAPH...
Publication number
20110244402
Publication date
Oct 6, 2011
TOKYO ELECTRON LIMITED
Michael A. Carcasi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF SLIMMING RADIATION-SENSITIVE MATERIAL LINES IN LITHOGRAPH...
Publication number
20110244403
Publication date
Oct 6, 2011
TOKYO ELECTRON LIMITED
Michael A. Carcasi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY