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Benjamin Sams
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San Diego, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Method of purifying target material for an EUV light source
Patent number
11,317,501
Issue date
Apr 26, 2022
ASML Netherlands B.V.
Georgiy Vaschenko
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Method and apparatus for purifying target material for EUV light so...
Patent number
10,455,680
Issue date
Oct 22, 2019
ASML Netherlands B.V.
Georgiy Vaschenko
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Patents Applications
last 30 patents
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Patent Application
HYBRID DROPLET GENERATOR FOR EXTREME ULTRAVIOLET LIGHT SOURCES IN L...
Publication number
20230171869
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Benjamin Andrew Sams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DROPLET GENERATOR NOZZLE
Publication number
20220363596
Publication date
Nov 17, 2022
ASML NETHERLANDS B.V.
Dietmar Uwe Herbert Trees
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID CONTROL DEVICE AND METHOD FOR FLUID CONTROL IN AN EXTREME ULT...
Publication number
20220213981
Publication date
Jul 7, 2022
ASML NETHERLANDS B.V.
Benjamin Andrew Sams
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
Publication number
20200015343
Publication date
Jan 9, 2020
ASML NETHERLANDS B.V.
Georgiy VASCHENKO
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD AND APPARATUS FOR PURIFYING TARGET MATERIAL FOR EUV LIGHT SO...
Publication number
20170247778
Publication date
Aug 31, 2017
ASML NETHERLANDS B.V.
Georgiy Vaschenko
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...