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Benjamin Swerts
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Deurne, BE
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last 30 patents
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Patent Grant
Apparatus and methods for setting up optical inspection parameters
Patent number
8,830,454
Issue date
Sep 9, 2014
KLA-Tencor Corporation
Johan De Greeve
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
APPARATUS AND METHODS FOR SETTING UP OPTICAL INSPECTION PARAMETERS
Publication number
20110255081
Publication date
Oct 20, 2011
KLA-Tencor Corporation
Johan De Greeve
G01 - MEASURING TESTING