Benjamin Y. H. Liu

Person

Minneapolis, MN, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for real-time size-distributed measurement of aerosol mas...
- Patent number 11,085,861
- Issue date Aug 10, 2021
- MSP Corporation
- Modi Chen
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for vapor generation and film deposition
- Patent number 10,287,679
- Issue date May 14, 2019
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for generating monodisperse aerosols
- Patent number 9,895,707
- Issue date Feb 20, 2018
- MSP Corporation
- Hongxu Duan
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for vapor generation and film deposition
- Patent number 9,797,593
- Issue date Oct 24, 2017
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrical ionizer for aerosol charge conditioning and measurement
- Patent number 9,764,333
- Issue date Sep 19, 2017
- MSP Corporation
- William Dick
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Electrospray ionizer for mass spectrometry of aerosol particles
- Patent number 9,768,005
- Issue date Sep 19, 2017
- MSP Corporation
- Siqin He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle sampling and measurement in the ambient air
- Patent number 9,541,488
- Issue date Jan 10, 2017
- MSP Corporation
- Benjamin Y. H. Liu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for vapor and gas filtration
- Patent number 9,089,800
- Issue date Jul 28, 2015
- MSP Corporation
- Benjamin Y. H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fine droplet atomization for liquid precursor vaporization
- Patent number 8,986,784
- Issue date Mar 24, 2015
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for vapor generation and wafer cleaning
- Patent number 8,945,281
- Issue date Feb 3, 2015
- MSP Corporation
- Thuc M. Dinh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid flow control for film deposition
- Patent number 8,783,652
- Issue date Jul 22, 2014
- MPS Corporation
- Thuc M. Dinh
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Apparatus for vapor condensation and recovery
- Patent number 8,728,240
- Issue date May 20, 2014
- MSP Corporation
- Benjamin Y. H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for counting particles in a gas
- Patent number 8,711,338
- Issue date Apr 29, 2014
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
High stability and high capacity precursor vapor generation for thi...
- Patent number 8,603,580
- Issue date Dec 10, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for counting particles in a gas
- Patent number 8,603,247
- Issue date Dec 10, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for generating vapor at high rates
- Patent number 8,554,064
- Issue date Oct 8, 2013
- MSP Corporation
- Thuc Dinh
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for liquid precursor atomization
- Patent number 8,529,985
- Issue date Sep 10, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Fine droplet atomizer for liquid precursor vaporization
- Patent number 8,511,583
- Issue date Aug 20, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method for counting particles in a gas
- Patent number 8,465,791
- Issue date Jun 18, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for liquid precursor atomization
- Patent number 8,393,599
- Issue date Mar 12, 2013
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for particle filtration and enhancing tool per...
- Patent number 8,297,223
- Issue date Oct 30, 2012
- MSP Corporation
- Benjamin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for liquid precursor atomization
- Patent number 8,132,793
- Issue date Mar 13, 2012
- MSP Corporation
- Benjamin Y. H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for generating charged particles for depositio...
- Patent number 7,882,799
- Issue date Feb 8, 2011
- MSP Corporation
- William Dick
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for high-accuracy fiber counting in air
- Patent number 7,830,510
- Issue date Nov 9, 2010
- MSP Corporation
- Benjamin Y. H. Liu
- G01 - MEASURING TESTING
Information Patent Grant
Aerosol measurement by dilution and particle counting
- Patent number 7,363,828
- Issue date Apr 29, 2008
- MSP Corporation
- Benjamin Y. H. Liu
- G01 - MEASURING TESTING
Information Patent Grant
Personal mask test system
- Patent number 7,325,441
- Issue date Feb 5, 2008
- MSP Corporation
- Benjamin Y. H. Liu
- A62 - LIFE-SAVING FIRE-FIGHTING
Information Patent Grant
Synthesis of nanoporous particles
- Patent number 7,276,224
- Issue date Oct 2, 2007
- Regents of The University of Minnesota
- Michael R. Zachariah
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Electrostatic precipitator for diesel blow-by
- Patent number 7,267,711
- Issue date Sep 11, 2007
- MSP Corporation
- Benjamin Y. H. Liu
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Grant
Cascade impactor with individually driven impactor plates
- Patent number 7,082,811
- Issue date Aug 1, 2006
- MSP Corporation
- Virgil A. Marple
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic precipitator with internal power supply
- Patent number 6,902,604
- Issue date Jun 7, 2005
- Fleetguard, Inc.
- Scott P. Heckel
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for vapor generation and film deposition
- Publication number 20180044789
- Publication date Feb 15, 2018
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
E-cigarette actuator
- Publication number 20170020198
- Publication date Jan 26, 2017
- MSP Corporation
- Amir Naqwi
- A24 - TOBACCO CIGARS CIGARETTES SMOKERS' REQUISITES
Information Patent Application
Apparatus and method for vapor generation and film deposition
- Publication number 20160334099
- Publication date Nov 17, 2016
- MSP Corporation
- Thuc M. Dinh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Air conditioning system with vapor bypassing
- Publication number 20160091228
- Publication date Mar 31, 2016
- MSP Corporation
- Amir A. Naqwi
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Application
METHOD AND APPARATUS FOR GENERATING MONODISPERSE AEROSOLS
- Publication number 20150314317
- Publication date Nov 5, 2015
- MSP Corporation
- Hongxu Duan
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Apparatus for filtration and gas-vapor mixing in thin film deposition
- Publication number 20140096715
- Publication date Apr 10, 2014
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE SAMPLING AND MEASUREMENT IN THE AMBIENT AIR
- Publication number 20140083167
- Publication date Mar 27, 2014
- MSP Corporation
- Benjamin Y. H. Liu
- G01 - MEASURING TESTING
Information Patent Application
Integrated system for vapor generation and thin film deposition
- Publication number 20130312674
- Publication date Nov 28, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Fine droplet atomizer for liquid precursor vaporization
- Publication number 20130292485
- Publication date Nov 7, 2013
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Apparatus for vapor condensation and recovery
- Publication number 20130295749
- Publication date Nov 7, 2013
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for vapor condensation and recovery
- Publication number 20130295776
- Publication date Nov 7, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for counting particles in a gas
- Publication number 20130239888
- Publication date Sep 19, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Liquid flow control for film deposition
- Publication number 20130233395
- Publication date Sep 12, 2013
- Thuc M. Dinh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for vapor and gas filtration
- Publication number 20130203264
- Publication date Aug 8, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for liquid precursor atomization
- Publication number 20130064976
- Publication date Mar 14, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method and apparatus for counting particles in a gas
- Publication number 20130036973
- Publication date Feb 14, 2013
- MSP Corporation
- Benjamin Y.H. Liu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method for generating charged particles
- Publication number 20120315768
- Publication date Dec 13, 2012
- MSP Corporation
- William Dick
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method and apparatus for liquid precursor atomization
- Publication number 20120132723
- Publication date May 31, 2012
- MSP Corporation
- Benjamin Y.H. Liu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Integrated system for vapor generation and thin film deposition
- Publication number 20110232588
- Publication date Sep 29, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information Patent Application
Electrical ionizer for aerosol charge conditioning and measurement
- Publication number 20110220811
- Publication date Sep 15, 2011
- MSP Corporation
- William Dick
- B03 - SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES O...
Information Patent Application
Fine droplet atomizer for liquid precursor vaporization
- Publication number 20110192909
- Publication date Aug 11, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for generating charged particles
- Publication number 20110097507
- Publication date Apr 28, 2011
- MSP Corporation
- William Dick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for counting particles in a gas
- Publication number 20110091649
- Publication date Apr 21, 2011
- MSP Corporation
- Benjamin Y.H. Liu
- G01 - MEASURING TESTING
Information Patent Application
High accuracy vapor generation and delivery for thin film deposition
- Publication number 20100203244
- Publication date Aug 12, 2010
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR HIGH-ACCURACY FIBER COUNTING IN AIR
- Publication number 20100085569
- Publication date Apr 8, 2010
- MSP Corporation
- Benjamin Y.H. Liu
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for liquid precursor atomization
- Publication number 20100065972
- Publication date Mar 18, 2010
- MSP Corporation
- Benjamin Y.H. Liu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Apparatus for filtration and gas-vapor mixing in thin film deposition
- Publication number 20090293807
- Publication date Dec 3, 2009
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PARTICLE FILTRATION AND ENHANCING TOOL PER...
- Publication number 20090084315
- Publication date Apr 2, 2009
- MSP Corporation
- Benjamin Y.H. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Aerosol measurement by dilution and particle counting
- Publication number 20070242261
- Publication date Oct 18, 2007
- MSP Corporation
- Benjamin Y.H. Liu
- G01 - MEASURING TESTING
Information Patent Application
SYNTHESIS OF NANOPOROUS PARTICLES
- Publication number 20070207084
- Publication date Sep 6, 2007
- Michael R. Zachariah
- B82 - NANO-TECHNOLOGY

Benjamin Y. H. Liu

Person

Patents Grantslast 30 patents

Apparatus for real-time size-distributed measurement of aerosol mas...

Apparatus and method for vapor generation and film deposition

Method and apparatus for generating monodisperse aerosols

Apparatus and method for vapor generation and film deposition

Electrical ionizer for aerosol charge conditioning and measurement

Electrospray ionizer for mass spectrometry of aerosol particles

Particle sampling and measurement in the ambient air

Method and apparatus for vapor and gas filtration

Fine droplet atomization for liquid precursor vaporization

Method and apparatus for vapor generation and wafer cleaning

Liquid flow control for film deposition

Apparatus for vapor condensation and recovery

Apparatus for counting particles in a gas

High stability and high capacity precursor vapor generation for thi...

Apparatus for counting particles in a gas

Method and apparatus for generating vapor at high rates

Method for liquid precursor atomization

Fine droplet atomizer for liquid precursor vaporization

Method for counting particles in a gas

Apparatus for liquid precursor atomization

Method and apparatus for particle filtration and enhancing tool per...

Method and apparatus for liquid precursor atomization

Method and apparatus for generating charged particles for depositio...

Apparatus for high-accuracy fiber counting in air

Aerosol measurement by dilution and particle counting

Personal mask test system

Synthesis of nanoporous particles

Electrostatic precipitator for diesel blow-by

Cascade impactor with individually driven impactor plates

Electrostatic precipitator with internal power supply

Patents Applicationslast 30 patents

Apparatus and method for vapor generation and film deposition

E-cigarette actuator

Apparatus and method for vapor generation and film deposition

Air conditioning system with vapor bypassing

METHOD AND APPARATUS FOR GENERATING MONODISPERSE AEROSOLS

Apparatus for filtration and gas-vapor mixing in thin film deposition

PARTICLE SAMPLING AND MEASUREMENT IN THE AMBIENT AIR

Integrated system for vapor generation and thin film deposition

Fine droplet atomizer for liquid precursor vaporization

Apparatus for vapor condensation and recovery

Method for vapor condensation and recovery

Apparatus for counting particles in a gas

Liquid flow control for film deposition

Method and apparatus for vapor and gas filtration

Method for liquid precursor atomization

Method and apparatus for counting particles in a gas

Method for generating charged particles

Method and apparatus for liquid precursor atomization

Integrated system for vapor generation and thin film deposition

Electrical ionizer for aerosol charge conditioning and measurement

Fine droplet atomizer for liquid precursor vaporization

Method for generating charged particles

Method and apparatus for counting particles in a gas

High accuracy vapor generation and delivery for thin film deposition

APPARATUS FOR HIGH-ACCURACY FIBER COUNTING IN AIR

Method and apparatus for liquid precursor atomization

Apparatus for filtration and gas-vapor mixing in thin film deposition

METHOD AND APPARATUS FOR PARTICLE FILTRATION AND ENHANCING TOOL PER...

Aerosol measurement by dilution and particle counting

SYNTHESIS OF NANOPOROUS PARTICLES