Benny KU

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Bielefeld, DE

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light reflective structure including nano-latti...
- Patent number 11,762,280
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Benny Ku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...
- Publication number 20230375909
- Publication date Nov 23, 2023
- TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.
- Benny KU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...
- Publication number 20220365416
- Publication date Nov 17, 2022
- TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.
- Benny KU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY