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Bensely Albert
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Atlanta, GA, US
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Patents Grants
last 30 patents
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Patent Grant
Substrate table, lithographic apparatus and device manufacturing me...
Patent number
9,329,497
Issue date
May 3, 2016
ASML Netherlands B.V.
Bensely Albert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Substrate Table, Lithographic Apparatus and Device Manufacturing Me...
Publication number
20130301028
Publication date
Nov 14, 2013
ASML NETHERLANDS B.V.
Bensely Albert
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...