Beomsoo HWANG

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Loose type pneumatic valve and loose type pneumatic valve module in...
- Patent number 11,920,689
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Jongkyu Kim
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas supply apparatus
- Patent number 11,846,391
- Issue date Dec 19, 2023
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Wafer processing apparatus including equipment front end module (EF...
- Patent number 11,804,393
- Issue date Oct 31, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM
- Publication number 20240178025
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- Hyunwoong Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICOND...
- Publication number 20240021452
- Publication date Jan 18, 2024
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY APPARATUS
- Publication number 20230332747
- Publication date Oct 19, 2023
- Samsung Electronics Co., Ltd.
- Beomsoo HWANG
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230230865
- Publication date Jul 20, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOOSE TYPE PNEUMATIC VALVE AND LOOSE TYPE PNEUMATIC VALVE MODULE IN...
- Publication number 20230220924
- Publication date Jul 13, 2023
- Samsung Electronics Co., Ltd.
- Jongkyu KIM
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE...
- Publication number 20230097418
- Publication date Mar 30, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING...
- Publication number 20230080991
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS INCLUDING EQUIPMENT FRONT END MODULE (EF...
- Publication number 20230072147
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET,...
- Publication number 20220274780
- Publication date Sep 1, 2022
- Samsung Electronics Co., Ltd.
- Kyeongsup BYEON
- G06 - COMPUTING CALCULATING COUNTING

Beomsoo HWANG

Person

Patents Grantslast 30 patents

Loose type pneumatic valve and loose type pneumatic valve module in...

Gas supply apparatus

Wafer processing apparatus including equipment front end module (EF...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING DEVICE AND SEMICONDUCTOR PROCESSING SYSTEM

WAFER TRANSFER APPARATUS CAPABLE OF AUTOMATIC TEACHING AND SEMICOND...

GAS SUPPLY APPARATUS

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

LOOSE TYPE PNEUMATIC VALVE AND LOOSE TYPE PNEUMATIC VALVE MODULE IN...

LOADLOCK APPARATUS AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE...

WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING...

WAFER PROCESSING APPARATUS INCLUDING EQUIPMENT FRONT END MODULE (EF...

TRANSFER ROBOT FOR TRANSFERRING GAS CONTAINER, GAS SUPPLY CABINET,...