Bernard Fay

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Los Gatos, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Automated overlay metrology system
- Patent number 7,087,352
- Issue date Aug 8, 2006
- Nikon Corporation
- Bernard Fay
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Automated overlay metrology system
- Publication number 20040109165
- Publication date Jun 10, 2004
- Bernard Fay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Automated overlay metrology system
- Publication number 20020192577
- Publication date Dec 19, 2002
- Bernard Fay
- H01 - BASIC ELECTRIC ELEMENTS