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Bernardus Antonius Johannes Luttikhuis
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Nuenen, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,289,498
Issue date
Oct 16, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method for clamping...
Patent number
8,264,670
Issue date
Sep 11, 2012
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate handler, lithographic apparatus and device manufacturing...
Patent number
8,174,680
Issue date
May 8, 2012
ASML Netherlands B.V.
Harmen Klaas Van Der Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,961,291
Issue date
Jun 14, 2011
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuit manufacturing methods with patterning device pos...
Patent number
7,804,584
Issue date
Sep 28, 2010
ASML Netherland B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method and exchangeabl...
Patent number
7,724,351
Issue date
May 25, 2010
ASML Netherlands B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing a...
Patent number
7,656,506
Issue date
Feb 2, 2010
ASML Netherlands B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate handler, lithographic apparatus and device manufacturing...
Patent number
7,576,835
Issue date
Aug 18, 2009
ASML Netherlands B.V.
Harmen Klaas Van Der Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, thermal conditioning system, and method for...
Patent number
7,545,478
Issue date
Jun 9, 2009
ASML Netherlands B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing a...
Patent number
7,538,857
Issue date
May 26, 2009
ASML Netherlands B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method utilizing mo...
Patent number
7,522,258
Issue date
Apr 21, 2009
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Displacement measurement system, lithographic apparatus, displaceme...
Patent number
7,483,120
Issue date
Jan 27, 2009
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus with patterning device position determination
Patent number
7,471,373
Issue date
Dec 30, 2008
ASML Netherlands B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,375,795
Issue date
May 20, 2008
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,352,438
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,256,867
Issue date
Aug 14, 2007
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,253,875
Issue date
Aug 7, 2007
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,130,019
Issue date
Oct 31, 2006
ASML Netherlands B.V.
Petrus Rutgerus Bartray
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
7,126,664
Issue date
Oct 24, 2006
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,061,579
Issue date
Jun 13, 2006
ASML Netherlands B.V.
Pertrus Rutgerus Bartray
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,977,713
Issue date
Dec 20, 2005
ASML Netherlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method Utilizing a...
Publication number
20100085553
Publication date
Apr 8, 2010
ASML NETHERLANDS B.V.
Hernes Jacobs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100002207
Publication date
Jan 7, 2010
ASML NETHERLANDS B.V.
Erik Roelof LOOPSTRA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Handler, Lithographic Apparatus and Device Manufacturing...
Publication number
20090284730
Publication date
Nov 19, 2009
ASML NETHERLANDS B.V.
Harmen Klaas VAN DER SCHOOT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Integrated Circuit Manufacturing Methods with Patterning Device Pos...
Publication number
20090061361
Publication date
Mar 5, 2009
ASML NETHERLANDS B.V.
Petrus Rutgerus Bartray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Displacement measurement system, lithographic apparatus, displaceme...
Publication number
20070263197
Publication date
Nov 15, 2007
ASML Nethlerlands B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20070146678
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and a device manufacturing method
Publication number
20060007414
Publication date
Jan 12, 2006
ASML NETHERLANDS B.V.
Bernardus Antonius Johannes Luttikhuis
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, thermal conditioning system, and method for...
Publication number
20050248739
Publication date
Nov 10, 2005
ASML NETHERLANDS B.V.
Wilhelmus Josephus Box
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050105070
Publication date
May 19, 2005
ASML NETHERLANDS B.V.
Pertrus Rutgerus Bartray
G02 - OPTICS