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Bernd Fruhberger
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Encinitas, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Fixed parallel plate MEMS capacitor microsensor array
Patent number
7,489,017
Issue date
Feb 10, 2009
Xsilogy Inc.
Sanjay V. Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for making fixed parallel plate MEMS capacitor microsensors...
Patent number
7,393,740
Issue date
Jul 1, 2008
Xsilogy Inc.
Sanjay V. Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dense thin film-based chemical sensors and methods for making and u...
Patent number
7,340,941
Issue date
Mar 11, 2008
Xsilogy, Inc.
Bernd Fruhberger
G01 - MEASURING TESTING
Information
Patent Grant
Fixed parallel plate MEMS capacitor microsensor and microsensor arr...
Patent number
7,115,969
Issue date
Oct 3, 2006
Xsilogy, Inc.
Sanjay V. Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor and sensor array having improved selectivity
Patent number
6,977,511
Issue date
Dec 20, 2005
Xsilogy, Inc.
Sanjay V. Patel
G01 - MEASURING TESTING
Information
Patent Grant
Sensor having improved selectivity
Patent number
6,864,692
Issue date
Mar 8, 2005
Xsilogy, Inc.
Sanjay V. Patel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Methods for making fixed parallel plate MEMS capacitor microsensors...
Publication number
20070264741
Publication date
Nov 15, 2007
Xsilogy, Inc.
Sanjay V. Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Fixed parallel plate MEMS capacitor microsensor array
Publication number
20070194406
Publication date
Aug 23, 2007
Xsilogy, Inc.
Sanjay V. Patel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Sensor and sensor array having improved selectivity
Publication number
20050164285
Publication date
Jul 28, 2005
Sanjay V. Patel
G01 - MEASURING TESTING