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Bernd Geh
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Aalen, DE
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last 30 patents
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Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
7,301,622
Issue date
Nov 27, 2007
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
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Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
6,934,011
Issue date
Aug 23, 2005
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
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Patent Grant
Method for optimizing the image properties of at least two optical...
Patent number
6,678,240
Issue date
Jan 13, 2004
Carl Zeiss SMT AG
Bernd Geh
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Interferometer system and interferometric method
Publication number
20020085208
Publication date
Jul 4, 2002
Christoph Hauger
G01 - MEASURING TESTING