Bernd Geh

Person

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for performing an aerial image simulation of a...
- Patent number 11,366,382
- Issue date Jun 21, 2022
- Carl Zeiss SMT GmbH
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system, and method
- Patent number 10,852,643
- Issue date Dec 1, 2020
- Carl Zeiss SMT GmbH
- Dirk Juergens
- G02 - OPTICS
Information Patent Grant
Substrate edge detection
- Patent number 10,607,873
- Issue date Mar 31, 2020
- ASML Netherlands B.V.
- Eric Anthony Janda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating a predetermined three-dimension...
- Patent number 10,353,295
- Issue date Jul 16, 2019
- Carl Zeiss SMS Ltd.
- Vladimir Dmitriev
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Projection objective for microlithography
- Patent number 9,568,838
- Issue date Feb 14, 2017
- Carl Zeiss SMT GmbH
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for microlithography
- Patent number 9,217,932
- Issue date Dec 22, 2015
- Carl Zeiss SMT GmbH
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,339,574
- Issue date Dec 25, 2012
- ASML Netherlands B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective for microlithography
- Patent number 8,212,988
- Issue date Jul 3, 2012
- Carl Zeiss GmbH
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic processing optimization based on hypersampled correlat...
- Patent number 8,120,748
- Issue date Feb 21, 2012
- ASML Netherlands B.V.
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining intensity distribution in the image plane of...
- Patent number 7,961,297
- Issue date Jun 14, 2011
- Carl Zeiss SMS GmbH
- Joern Greif-Wuestenbecker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminator for a lithographic apparatus and method
- Patent number 7,952,685
- Issue date May 31, 2011
- Carl Zeiss SMT AG
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method, program product and apparatus for obtaining short-range fla...
- Patent number 7,818,151
- Issue date Oct 19, 2010
- ASML Masktools B.V.
- Tamer Coskun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,684,013
- Issue date Mar 23, 2010
- ASML Netherlands B.V.
- Steven George Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing an optical component
- Patent number 7,581,305
- Issue date Sep 1, 2009
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B24 - GRINDING POLISHING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,423,727
- Issue date Sep 9, 2008
- ASML Netherlands B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic processing optimization based on hypersampled correlat...
- Patent number 7,198,873
- Issue date Apr 3, 2007
- ASML Netherlands B.V.
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...
- Publication number 20210263406
- Publication date Aug 26, 2021
- Carl Zeiss SMT GMBH
- Vladimir Dmitriev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL SYSTEM, AND METHOD
- Publication number 20200073252
- Publication date Mar 5, 2020
- Carl Zeiss SMT GMBH
- Dirk Juergens
- G02 - OPTICS
Information Patent Application
SUBSTRATE EDGE DETECTION
- Publication number 20190101839
- Publication date Apr 4, 2019
- ASML NETHERLANDS B.V.
- Eric Anthony JANDA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20170248850
- Publication date Aug 31, 2017
- Carl Zeiss SMT GMBH
- Bernd GEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR GENERATING A PREDETERMINED THREE-DIMENSION...
- Publication number 20170010540
- Publication date Jan 12, 2017
- CARL ZEISS SMS LTD.
- Vladimir Dmitriev
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20160170307
- Publication date Jun 16, 2016
- Bernd GEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20120327382
- Publication date Dec 27, 2012
- Bernd GEH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20080304037
- Publication date Dec 11, 2008
- ASML NETHERLANDS B.V.
- Michael TOTZECK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF CONTROLLING
- Publication number 20080284998
- Publication date Nov 20, 2008
- Carl Zeiss SMT AG
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection Objective For Microlithography
- Publication number 20080252987
- Publication date Oct 16, 2008
- Carl Zeiss SMT AG
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illuminator for a lithographic apparatus and method
- Publication number 20080225260
- Publication date Sep 18, 2008
- ASML NETHERLANDS B.V.
- Michel Fransois Hubert Klaassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for Determining Intensity Distribution in the Image Plane of...
- Publication number 20080212060
- Publication date Sep 4, 2008
- CARL ZEISS SMS GMBH
- Joern Greif-Wuestenbecker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR PROD...
- Publication number 20080204692
- Publication date Aug 28, 2008
- Carl Zeiss SMT AG
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20080068599
- Publication date Mar 20, 2008
- Carl Zeiss SMT AG
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Method, program product and apparatus for obtaining short-range fla...
- Publication number 20070260437
- Publication date Nov 8, 2007
- Tamer Coskun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic processing optimization based on hypersampled correlat...
- Publication number 20070146668
- Publication date Jun 28, 2007
- ASML Netherlands B.V.
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070002300
- Publication date Jan 4, 2007
- ASML NETHERLANDS B.V.
- Steven George Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060256311
- Publication date Nov 16, 2006
- ASML NETHERLANDS B.V.
- Steven Hansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20060164621
- Publication date Jul 27, 2006
- ASML NETHERLANDS B.V.
- Michael Totzeck
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20050254042
- Publication date Nov 17, 2005
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Method of manufacturing an optical component and optical system usi...
- Publication number 20050223539
- Publication date Oct 13, 2005
- Carl Zeiss SMT AG
- Bernhard Geuppert
- B24 - GRINDING POLISHING
Information Patent Application
Lithographic processing optimization based on hypersampled correlat...
- Publication number 20050106479
- Publication date May 19, 2005
- Bernd Geh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimising the image properties of at least two optical...
- Publication number 20040090617
- Publication date May 13, 2004
- Bernd Geh
- G02 - OPTICS
Information Patent Application
Method for optimizing the image properties of at least two optical...
- Publication number 20030071986
- Publication date Apr 17, 2003
- Bernd Geh
- G02 - OPTICS

Person

Patents Grantslast 30 patents

Method and apparatus for performing an aerial image simulation of a...

Optical system, and method

Substrate edge detection

Method and apparatus for generating a predetermined three-dimension...

Projection objective for microlithography

Projection objective for microlithography

Lithographic apparatus and device manufacturing method

Projection objective for microlithography

Lithographic processing optimization based on hypersampled correlat...

Method for determining intensity distribution in the image plane of...

Illuminator for a lithographic apparatus and method

Method, program product and apparatus for obtaining short-range fla...

Lithographic apparatus and device manufacturing method

Method of manufacturing an optical component

Lithographic apparatus and device manufacturing method

Lithographic processing optimization based on hypersampled correlat...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PERFORMING AN AERIAL IMAGE SIMULATION OF A...

OPTICAL SYSTEM, AND METHOD

SUBSTRATE EDGE DETECTION

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

METHOD AND APPARATUS FOR GENERATING A PREDETERMINED THREE-DIMENSION...

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS AND METHOD OF CONTROLLING

Projection Objective For Microlithography

Illuminator for a lithographic apparatus and method

Method for Determining Intensity Distribution in the Image Plane of...

MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD FOR PROD...

Method for optimizing the image properties of at least two optical...

Method, program product and apparatus for obtaining short-range fla...

Lithographic processing optimization based on hypersampled correlat...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Method for optimizing the image properties of at least two optical...

Method of manufacturing an optical component and optical system usi...

Lithographic processing optimization based on hypersampled correlat...

Method for optimising the image properties of at least two optical...

Method for optimizing the image properties of at least two optical...