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Bernd Kuechler
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Methods of compensating lens heating, lithographic projection syste...
Patent number
7,855,776
Issue date
Dec 21, 2010
Qimonda AG
Bernd Kuechler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for optimizing a photolithographic mask
Patent number
7,370,313
Issue date
May 6, 2008
Infineon Technologies AG
Christoph Noelscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Methods of Compensating Lens Heating, Lithographic Projection Syste...
Publication number
20090244502
Publication date
Oct 1, 2009
Bernd Kuechler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for automatically generating at least one of a mask layout a...
Publication number
20080010627
Publication date
Jan 10, 2008
Thomas Muelders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for Automatically Generating at Least One of a Mask Layout a...
Publication number
20080008972
Publication date
Jan 10, 2008
Thomas Muelders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Arrangement for the transfer of structural elements of a photomask...
Publication number
20070229790
Publication date
Oct 4, 2007
Bernd Kuechler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for optimizing a photolithographic mask
Publication number
20070038972
Publication date
Feb 15, 2007
Christoph Noelscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY