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Bernd Kutsch
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Konz, DE
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Patents Grants
last 30 patents
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Patent Grant
Device and method for anisotropic plasma etching of a substrate, pa...
Patent number
7,288,485
Issue date
Oct 30, 2007
Robert Bosch GmbH
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device and method for anisotropic plasma etching of a substrate, a...
Patent number
7,285,228
Issue date
Oct 23, 2007
Robert Bosch GmbH
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of avoiding or eliminating deposits in the exhaust area of a...
Patent number
6,874,511
Issue date
Apr 5, 2005
Robert Bosch GmbH
Bernd Kutsch
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Device and method for anisotropically plasma etching of a substrate...
Publication number
20050126710
Publication date
Jun 16, 2005
Franz Laermer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device and method for anisotropic plasma etching of a substrate, pa...
Publication number
20040134615
Publication date
Jul 15, 2004
Klaus Breitschwerdt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of avoiding or eliminating deposits in the exhaust area of a...
Publication number
20030019506
Publication date
Jan 30, 2003
Bernd Kutsch
H01 - BASIC ELECTRIC ELEMENTS