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Essenheim, DE
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last 30 patents
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Patent Grant
Method for quantitatively and/or qualitatively detecting layer thic...
Patent number
7,396,684
Issue date
Jul 8, 2008
Institut fur Mikrotechnik Mainz GmbH
Wolfgang Ehrfeld
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method for quantitatively and/or qualitatively detecting layer thic...
Publication number
20050025676
Publication date
Feb 3, 2005
Wolfgang Ehrfeld
G01 - MEASURING TESTING