Bernd Schulz

Person

Radebeul, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for reducing overlay errors within exposure field...
- Patent number 7,842,442
- Issue date Nov 30, 2010
- Advanced Micro Devices, Inc.
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Structure and method for simultaneously determining an overlay accu...
- Patent number 7,667,842
- Issue date Feb 23, 2010
- GLOBALFOUNDRIES, INC.
- Bernd Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for determining an overlay accuracy
- Patent number 7,666,559
- Issue date Feb 23, 2010
- GlobalFoundries, Inc.
- Bernd Schulz
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Two-dimensional structure for determining an overlay accuracy by me...
- Patent number 7,099,010
- Issue date Aug 29, 2006
- Advanced Micro Devices, Inc.
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for determining an overlay error and critical dimensions...
- Patent number 6,816,252
- Issue date Nov 9, 2004
- Advanced Micro Devices, Inc.
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometer including an internal calibration system
- Patent number 6,795,193
- Issue date Sep 21, 2004
- Advanced Micro Devices, Inc.
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor structure and method for determining critical dimensi...
- Patent number 6,767,680
- Issue date Jul 27, 2004
- Advanced Micro Devices, Inc.
- Bernd Schulz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor structure and method for determining critical dimensi...
- Patent number 6,765,282
- Issue date Jul 20, 2004
- Advanced Micro Devices, Inc.
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Grant
Die corner alignment structure
- Patent number 6,724,096
- Issue date Apr 20, 2004
- Advanced Micro Devices, Inc.
- Thomas Werner
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE AND METHOD FOR DETERMINING AN OVERLAY ACCURACY
- Publication number 20090087756
- Publication date Apr 2, 2009
- Bernd Schulz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR GENERATING METROLOGY TAGS TO ALLOW AUTOMAT...
- Publication number 20090082897
- Publication date Mar 26, 2009
- Jason P. Cain
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS WITHIN EXPOSURE FIELD...
- Publication number 20080057418
- Publication date Mar 6, 2008
- Rolf Seltmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE AND METHOD FOR SIMULTANEOUSLY DETERMINING AN OVERLAY ACCU...
- Publication number 20070076205
- Publication date Apr 5, 2007
- Bernd Schulz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Scatterometer including an internal calibration system
- Publication number 20030223072
- Publication date Dec 4, 2003
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Application
Two-dimensional structure for determining an overlay accuracy by me...
- Publication number 20030224261
- Publication date Dec 4, 2003
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor structure and method for determining critical dimensi...
- Publication number 20030044702
- Publication date Mar 6, 2003
- Bernd Schulz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus for determining an overlay error and critical dimensions...
- Publication number 20030043372
- Publication date Mar 6, 2003
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Application
Semiconductor structure and method for determining critical dimensi...
- Publication number 20030042579
- Publication date Mar 6, 2003
- Bernd Schulz
- G01 - MEASURING TESTING
Information Patent Application
Die corner alignment structure
- Publication number 20020185753
- Publication date Dec 12, 2002
- Thomas Werner
- H01 - BASIC ELECTRIC ELEMENTS

Bernd Schulz

Person

Patents Grantslast 30 patents

Method and system for reducing overlay errors within exposure field...

Structure and method for simultaneously determining an overlay accu...

Structure and method for determining an overlay accuracy

Two-dimensional structure for determining an overlay accuracy by me...

Apparatus for determining an overlay error and critical dimensions...

Scatterometer including an internal calibration system

Semiconductor structure and method for determining critical dimensi...

Semiconductor structure and method for determining critical dimensi...

Die corner alignment structure

Patents Applicationslast 30 patents

STRUCTURE AND METHOD FOR DETERMINING AN OVERLAY ACCURACY

METHOD AND APPARATUS FOR GENERATING METROLOGY TAGS TO ALLOW AUTOMAT...

METHOD AND SYSTEM FOR REDUCING OVERLAY ERRORS WITHIN EXPOSURE FIELD...

STRUCTURE AND METHOD FOR SIMULTANEOUSLY DETERMINING AN OVERLAY ACCU...

Scatterometer including an internal calibration system

Two-dimensional structure for determining an overlay accuracy by me...

Semiconductor structure and method for determining critical dimensi...

Apparatus for determining an overlay error and critical dimensions...

Semiconductor structure and method for determining critical dimensi...

Die corner alignment structure