Bernd Warm

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Schwaig, DE

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Patents Grantslast 30 patents

Information Patent Grant
Illumination system for a wavelength of ≦ 193 nm, with sensors for...
- Patent number 7,473,907
- Issue date Jan 6, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Illumination system for a wavelength of less than or equal to 193 n...
- Publication number 20050274897
- Publication date Dec 15, 2005
- Carl Zeiss SMT AG and ASML Netherlands
- Wolfgang Singer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY