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Bernhard GEHL
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Wannweil, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method for closing openings in a flexible diaphragm of a MEMS element
Patent number
11,554,952
Issue date
Jan 17, 2023
Robert Bosch GmbH
Bernhard Gehl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone system
Patent number
11,012,789
Issue date
May 18, 2021
Akustica, Inc.
Christoph Hermes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS transducer system for pressure and acoustic sensing
Patent number
10,981,777
Issue date
Apr 20, 2021
Robert Bosch GmbH
Andrew Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System of non-acoustic sensor combined with MEMS microphone
Patent number
10,934,160
Issue date
Mar 2, 2021
Robert Bosch GmbH
Andrew Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing thin MEMS wafers
Patent number
10,793,430
Issue date
Oct 6, 2020
Robert Bosch GmbH
Sebastien Loiseau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microphone with encapsulated moving electrode
Patent number
10,555,090
Issue date
Feb 4, 2020
Akustica, Inc.
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone system having an electrode assembly
Patent number
10,555,088
Issue date
Feb 4, 2020
Akustica, Inc.
Daniel Meisel
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
MEMS microphone system and method
Patent number
10,349,188
Issue date
Jul 9, 2019
Akustica, Inc.
Daniel C. Meisel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor with multiple membrane electrodes
Patent number
10,183,857
Issue date
Jan 22, 2019
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a microphone structure and a pressure sens...
Patent number
9,758,369
Issue date
Sep 12, 2017
Robert Bosch GmbH
Florian Schoen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capacitive MEMS-sensor element having bond pads for the electrical...
Patent number
9,725,300
Issue date
Aug 8, 2017
Robert Bosch GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS membrane overtravel stop
Patent number
9,369,804
Issue date
Jun 14, 2016
Robert Bosch GmbH
Thomas Buck
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Component having a micromechanical microphone structure, and method...
Patent number
9,042,581
Issue date
May 26, 2015
Robert Bosch GmbH
Jochen Zoellin
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Microphone component
Patent number
9,035,307
Issue date
May 19, 2015
Robert Bosch GmbH
Bernhard Gehl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
Publication number
20240400378
Publication date
Dec 5, 2024
ROBERT BOSCH GmbH
Peter Engelhart
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR CLOSING OPENINGS IN A FLEXIBLE DIAPHRAGM OF A MEMS ELEMENT
Publication number
20210229983
Publication date
Jul 29, 2021
ROBERT BOSCH GmbH
Bernhard Gehl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Transducer System for Pressure and Acoustic Sensing
Publication number
20190389721
Publication date
Dec 26, 2019
ROBERT BOSCH GmbH
Andrew Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
System of Non-Acoustic Sensor Combined with MEMS Microphone
Publication number
20190352176
Publication date
Nov 21, 2019
ROBERT BOSCH GmbH
Andrew Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Microphone System and Method
Publication number
20190116429
Publication date
Apr 18, 2019
Akustica, Inc.
Daniel C. Meisel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Microphone System
Publication number
20190098418
Publication date
Mar 28, 2019
ROBERT BOSCH GmbH
Christoph Hermes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING THIN MEMS WAFERS
Publication number
20190092631
Publication date
Mar 28, 2019
ROBERT BOSCH GmbH
Sebastien Loiseau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microphone with Encapsulated Moving Electrode
Publication number
20180352341
Publication date
Dec 6, 2018
Akustica, Inc.
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Microphone System having an Electrode Assembly
Publication number
20180146296
Publication date
May 24, 2018
Akustica, Inc.
Daniel Meisel
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
Method for manufacturing a microphone structure and a pressure sens...
Publication number
20160304336
Publication date
Oct 20, 2016
ROBERT BOSCH GmbH
Florian Schoen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPACITIVE MEMS-SENSOR ELEMENT HAVING BOND PADS FOR THE ELECTRICAL...
Publication number
20160280534
Publication date
Sep 29, 2016
ROBERT BOSCH GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Membrane Overtravel Stop
Publication number
20160029126
Publication date
Jan 28, 2016
Akustica, Inc.
Thomas Buck
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
MICROPHONE COMPONENT
Publication number
20140191233
Publication date
Jul 10, 2014
ROBERT BOSCH GmbH
Bernhard GEHL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR WITH MULTIPLE MEMBRANE ELECTRODES
Publication number
20140054731
Publication date
Feb 27, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD...
Publication number
20130010989
Publication date
Jan 10, 2013
Jochen Zoellin
H04 - ELECTRIC COMMUNICATION TECHNIQUE