Bernhard LOIDL

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Patents Grantslast 30 patents

Information Patent Grant
Vapor delivery head for preventing stiction of high aspect ratio st...
- Patent number 12,198,945
- Issue date Jan 14, 2025
- Lam Research AG
- Bhaskar Bandarapu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,887,122
- Issue date Feb 6, 2018
- Lam Research AG
- Hongbo Si
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
- Publication number 20210366738
- Publication date Nov 25, 2021
- LAM RESEARCH AG
- Bhaskar BANDARAPU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN CHUCK INCLUDING EDGE RING
- Publication number 20180096879
- Publication date Apr 5, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20180040502
- Publication date Feb 8, 2018
- LAM RESEARCH AG
- Shih-Chung KON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20170323823
- Publication date Nov 9, 2017
- LAM RESEARCH AG
- Hongbo SI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SPIN CHUCK WITH GAS LEAKAGE PREVENTION
- Publication number 20170162426
- Publication date Jun 8, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...