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Bernhard Stock
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Alzenau, DE
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last 30 patents
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Patent Grant
Apparatus and method for detecting a state of a deposition apparatus
Patent number
8,980,071
Issue date
Mar 17, 2015
Applied Materials, Inc.
Guido Mahnke
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Apparatus and Method for Detecting a State of a Deposition Apparatus
Publication number
20120012455
Publication date
Jan 19, 2012
Guido Mahnke
H01 - BASIC ELECTRIC ELEMENTS