Bernhard Weigl

Person

Steinheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Cooler for use in a device in a vacuum
- Patent number 10,303,067
- Issue date May 28, 2019
- Carl Zeiss SMT GmbH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Illumination apparatus and method for controlling energy of a laser...
- Patent number 8,723,073
- Issue date May 13, 2014
- Cymer, LLC
- Bernhard Weigl
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for measuring a spectrum of a narrowband light source, and s...
- Patent number 8,289,520
- Issue date Oct 16, 2012
- Carl Zeiss Laser Optics GmbH
- Johannes Kraus
- G01 - MEASURING TESTING
Information Patent Grant
Optical devices and related systems and methods
- Patent number 7,629,572
- Issue date Dec 8, 2009
- Carl Zeiss Laser Optics GmbH
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Grant
Attenuating filter for ultraviolet light
- Patent number 7,196,842
- Issue date Mar 27, 2007
- Carl Zeiss SMT AG
- Bernhard Weigl
- G02 - OPTICS
Information Patent Grant
Method and device for mutually aligning a mask pattern formed in a...
- Patent number 6,294,296
- Issue date Sep 25, 2001
- Carl-Zeiss-Stiftung
- Bernhard Weigl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
COOLER FOR USE IN A DEVICE IN A VACUUM
- Publication number 20160299443
- Publication date Oct 13, 2016
- Carl Zeiss SMT GMBH
- Willi Anderl
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE
- Publication number 20150083938
- Publication date Mar 26, 2015
- CARL ZEISS LASER OPTICS GmbH
- Willi Anderl
- G02 - OPTICS
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS,...
- Publication number 20100182710
- Publication date Jul 22, 2010
- Carl Zeiss SMT AG
- Udo DINGER
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND S...
- Publication number 20100079765
- Publication date Apr 1, 2010
- CARL ZEISS LASER OPTICS GmbH
- Johannes Kraus
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER...
- Publication number 20090201955
- Publication date Aug 13, 2009
- CARL ZEISS LASER OPTICS GmbH
- Bernhard Weigl
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR COATING AN OPTICAL COMPONENT FOR A LASER ARRANGEMENT AND...
- Publication number 20090027776
- Publication date Jan 29, 2009
- CARL ZEISS LASER OPTICS GmbH
- Michael Schall
- G02 - OPTICS
Information Patent Application
Optical devices and related systems and methods
- Publication number 20080272275
- Publication date Nov 6, 2008
- Vitaliy Shklover
- G02 - OPTICS
Information Patent Application
Attenuating filter for ultraviolet light
- Publication number 20050179996
- Publication date Aug 18, 2005
- Carl Zeiss SMT AG
- Bernhard Weigl
- G02 - OPTICS
Information Patent Application
Attenuating filter for ultraviolet light
- Publication number 20020191310
- Publication date Dec 19, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Bernhard Weigl
- G02 - OPTICS
Information Patent Application
Coating of optical elements, in particular for use with ultraviolet...
- Publication number 20020114880
- Publication date Aug 22, 2002
- CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
- Joerg Dreistein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Holding device for an optical element made of a crystalline material
- Publication number 20020108928
- Publication date Aug 15, 2002
- Carl Zeiss Semiconductor Manufacturing Technologies, AG
- Jurgen Hartmaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bernhard Weigl

Person

Patents Grantslast 30 patents

Cooler for use in a device in a vacuum

Illumination apparatus and method for controlling energy of a laser...

Method for measuring a spectrum of a narrowband light source, and s...

Optical devices and related systems and methods

Attenuating filter for ultraviolet light

Method and device for mutually aligning a mask pattern formed in a...

Patents Applicationslast 30 patents

COOLER FOR USE IN A DEVICE IN A VACUUM

COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE

METHOD FOR PRODUCING AN OPTICAL ELEMENT THROUGH A MOLDING PROCESS,...

METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND S...

ILLUMINATION APPARATUS AND METHOD FOR CONTROLLING ENERGY OF A LASER...

METHOD FOR COATING AN OPTICAL COMPONENT FOR A LASER ARRANGEMENT AND...

Optical devices and related systems and methods

Attenuating filter for ultraviolet light

Attenuating filter for ultraviolet light

Coating of optical elements, in particular for use with ultraviolet...

Holding device for an optical element made of a crystalline material