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Bernhard ZOBEL
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Dresden, DE
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last 30 patents
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Film forming method and apparatus
Patent number
9,076,649
Issue date
Jul 7, 2015
Tokyo Electron Limited
Keisuke Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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last 30 patents
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Patent Application
BOAT TRANSFER METHOD AND HEAT TREATMENT APPARATUS
Publication number
20220122867
Publication date
Apr 21, 2022
TOKYO ELECTRON LIMITED
Shingo HISHIYA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Application
FILM FORMING METHOD AND APPARATUS
Publication number
20130323935
Publication date
Dec 5, 2013
Keisuke SUZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...