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Migdal Haemek, IL
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Patent Grant
Method, system, and user interface for metrology target characteriz...
Patent number
10,242,290
Issue date
Mar 26, 2019
KLA-Tencor Corporation
Inna Tarshish-Shapir
G06 - COMPUTING CALCULATING COUNTING
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METROLOGY TARGET CHARACTERIZATION
Publication number
20140136137
Publication date
May 15, 2014
KLA-Tencor Corporation
Inna Tarshish-Shapir
G01 - MEASURING TESTING