Betty Tang

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Integrated low k dielectrics and etch stops
- Patent number 7,227,244
- Issue date Jun 5, 2007
- Applied Materials, Inc.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated low K dielectrics and etch stops
- Patent number 6,858,153
- Issue date Feb 22, 2005
- Applied Materials Inc.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated low k dielectrics and etch stops
- Patent number 6,669,858
- Issue date Dec 30, 2003
- Applied Materials Inc.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etch process in a single inter-level dielectric etch
- Patent number 6,399,511
- Issue date Jun 4, 2002
- Applied Materials, Inc.
- Betty Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated low K dielectrics and etch stops
- Patent number 6,340,435
- Issue date Jan 22, 2002
- Applied Materials, Inc.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counterbore dielectric plasma etch process particularly useful for...
- Patent number 6,211,092
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Betty Tang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Integrated low k dielectrics and etch stops
- Publication number 20050023694
- Publication date Feb 3, 2005
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma dielectric etch process using a long fluorocarbon
- Publication number 20020142598
- Publication date Oct 3, 2002
- Betty Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Intergrated low k dielectrics and etch stops
- Publication number 20020084257
- Publication date Jul 4, 2002
- APPLIED MATERIALS, INC.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated low k dielectrics and etch stops
- Publication number 20020074309
- Publication date Jun 20, 2002
- APPLIED MATERIALS, INC.
- Claes H. Bjorkman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma etch process in a single inter-level dielectric etch
- Publication number 20010004552
- Publication date Jun 21, 2001
- Betty Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etch process in a single inter-level dielectric etch
- Publication number 20010000246
- Publication date Apr 12, 2001
- Betty Tang
- H01 - BASIC ELECTRIC ELEMENTS