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Betty Zhang
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Gaithersburg, MD, US
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last 30 patents
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Patent Grant
Apparatus and process for measuring light intensities
Patent number
6,987,269
Issue date
Jan 17, 2006
Axcelis Technologies, Inc.
Alan C. Janos
G11 - INFORMATION STORAGE
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last 30 patents
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Patent Application
APPARATUS AND PROCESS FOR MEASURING LIGHT INTENSITIES
Publication number
20040113089
Publication date
Jun 17, 2004
Axcelis Technologies, Inc.
Alan C. Janos
G01 - MEASURING TESTING