Bhaskar BANDARAPU

Person

Villach, AT

People

Patents Grantslast 30 patents

Information Patent Grant
Spin chuck with rotating gas showerhead
- Patent number 10,167,552
- Issue date Jan 1, 2019
- LAM RESEARCH AG
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating surfaces of wafer-shaped articles
- Patent number 9,911,630
- Issue date Mar 6, 2018
- Lam Research AG
- Andreas Gleissner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,887,122
- Issue date Feb 6, 2018
- Lam Research AG
- Hongbo Si
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Slit nozzle
- Patent number 9,597,703
- Issue date Mar 21, 2017
- Lam Research AG
- Stefan Detterbeck
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE
- Publication number 20230411177
- Publication date Dec 21, 2023
- LAM RESEARCH AG
- Karl-Heinz HOHENWARTER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...
- Publication number 20210366738
- Publication date Nov 25, 2021
- LAM RESEARCH AG
- Bhaskar BANDARAPU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES
- Publication number 20170323823
- Publication date Nov 9, 2017
- LAM RESEARCH AG
- Hongbo SI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SPIN CHUCK WITH GAS LEAKAGE PREVENTION
- Publication number 20170162426
- Publication date Jun 8, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES
- Publication number 20170125266
- Publication date May 4, 2017
- LAM RESEARCH AG
- Andreas GLEISSNER
- B08 - CLEANING
Information Patent Application
SLIT NOZZLE
- Publication number 20160236227
- Publication date Aug 18, 2016
- LAM RESEARCH AG
- Stefan DETTERBECK
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SPIN CHUCK WITH ROTATING GAS SHOWERHEAD
- Publication number 20160230278
- Publication date Aug 11, 2016
- LAM RESEARCH AG
- Andreas GLEISSNER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Bhaskar BANDARAPU

Person

Patents Grantslast 30 patents

Spin chuck with rotating gas showerhead

Apparatus for treating surfaces of wafer-shaped articles

Method and apparatus for processing wafer-shaped articles

Slit nozzle

Patents Applicationslast 30 patents

APPARATUS FOR PROCESSING A WAFER-SHAPED ARTICLE

VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO ST...

METHOD AND APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES

SPIN CHUCK WITH GAS LEAKAGE PREVENTION

APPARATUS FOR TREATING SURFACES OF WAFER-SHAPED ARTICLES

SLIT NOZZLE

SPIN CHUCK WITH ROTATING GAS SHOWERHEAD