Bhushan N. Zope

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 10,699,946
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 10,269,633
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Bhushan N. Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for selective deposition of metal silicides via atomic laye...
- Patent number 10,199,230
- Issue date Feb 5, 2019
- Applied Materials, Inc.
- Seshadri Ganguli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for dry etching cobalt metal using fluorine radicals
- Patent number 10,163,656
- Issue date Dec 25, 2018
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 9,842,769
- Issue date Dec 12, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 9,685,371
- Issue date Jun 20, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for preferential growth of cobalt within substrate features
- Patent number 9,637,819
- Issue date May 2, 2017
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt removal for chamber clean or pre-clean process
- Patent number 9,528,183
- Issue date Dec 27, 2016
- Applied Materials, Inc.
- Kai Wu
- B08 - CLEANING
Information Patent Grant
Interface treatment of semiconductor surfaces with high density low...
- Patent number 9,378,941
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- Aneesh Nainani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of enabling seamless cobalt gap-fill
- Patent number 9,330,939
- Issue date May 3, 2016
- Applied Materials, Inc.
- Bhushan N. Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Surface treatment to improve CCTBA based CVD co nucleation on diele...
- Patent number 9,218,980
- Issue date Dec 22, 2015
- Applied Materials, Inc.
- Bhushan N. Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ENABLING SEAMLESS COBALT GAP-FILL
- Publication number 20180068890
- Publication date Mar 8, 2018
- Applied Materials, Inc.
- Bhushan N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ENABLING SEAMLESS COBALT GAP-FILL
- Publication number 20170084486
- Publication date Mar 23, 2017
- Applied Materials, Inc.
- Bhushan N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR SELECTIVE DEPOSITION OF METAL SILICIDES VIA ATOMIC LAYE...
- Publication number 20160322229
- Publication date Nov 3, 2016
- Applied Materials, Inc.
- Seshadri GANGULI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ENABLING SEAMLESS COBALT GAP-FILL
- Publication number 20160247718
- Publication date Aug 25, 2016
- Applied Materials, Inc.
- Bhushan N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT TO IMPROVE CCTBA BASED CVD CO NUCLEATION ON DIELE...
- Publication number 20160104639
- Publication date Apr 14, 2016
- Applied Materials, Inc.
- BHUSHAN N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DRY ETCHING COBALT METAL USING FLUORINE RADICALS
- Publication number 20150140812
- Publication date May 21, 2015
- Applied Materials, Inc.
- BHUSHAN N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PREFERENTIAL GROWTH OF COBALT WITHIN SUBSTRATE FEATURES
- Publication number 20150140233
- Publication date May 21, 2015
- Applied Materials, Inc.
- BHUSHAN N. ZOPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERFACE TREATMENT OF SEMICONDUCTOR SURFACES WITH HIGH DENSITY LOW...
- Publication number 20150093862
- Publication date Apr 2, 2015
- APPLIED MATEIRALS, INC.
- Aneesh Nainani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ENABLING SEAMLESS COBALT GAP-FILL
- Publication number 20150093891
- Publication date Apr 2, 2015
- Applied Materials, Inc.
- Bhushan N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT TO IMPROVE CCTBA BASED CVD CO NUCLEATION ON DIELE...
- Publication number 20150079784
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Bhushan N. ZOPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COBALT SUBSTRATE PROCESSING SYSTEMS, APPARATUS, AND METHODS
- Publication number 20150030771
- Publication date Jan 29, 2015
- Applied Materials, Inc.
- Avgerinos V. Gelatos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COBALT REMOVAL FOR CHAMBER CLEAN OR PRE-CLEAN PROCESS
- Publication number 20140326276
- Publication date Nov 6, 2014
- Applied Materials, Inc.
- Kai WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF ENABLING SEAMLESS COBALT GAP-FILL
- Publication number 20130260555
- Publication date Oct 3, 2013
- Bhushan N. ZOPE
- H01 - BASIC ELECTRIC ELEMENTS

Bhushan N. Zope

Person

Patents Grantslast 30 patents

Method of enabling seamless cobalt gap-fill

Method of enabling seamless cobalt gap-fill

Methods for selective deposition of metal silicides via atomic laye...

Methods for dry etching cobalt metal using fluorine radicals

Method of enabling seamless cobalt gap-fill

Method of enabling seamless cobalt gap-fill

Methods for preferential growth of cobalt within substrate features

Cobalt removal for chamber clean or pre-clean process

Interface treatment of semiconductor surfaces with high density low...

Method of enabling seamless cobalt gap-fill

Surface treatment to improve CCTBA based CVD co nucleation on diele...

Patents Applicationslast 30 patents

METHOD OF ENABLING SEAMLESS COBALT GAP-FILL

METHOD OF ENABLING SEAMLESS COBALT GAP-FILL

METHODS FOR SELECTIVE DEPOSITION OF METAL SILICIDES VIA ATOMIC LAYE...

METHOD OF ENABLING SEAMLESS COBALT GAP-FILL

SURFACE TREATMENT TO IMPROVE CCTBA BASED CVD CO NUCLEATION ON DIELE...

METHODS FOR DRY ETCHING COBALT METAL USING FLUORINE RADICALS

METHODS FOR PREFERENTIAL GROWTH OF COBALT WITHIN SUBSTRATE FEATURES

INTERFACE TREATMENT OF SEMICONDUCTOR SURFACES WITH HIGH DENSITY LOW...

METHOD OF ENABLING SEAMLESS COBALT GAP-FILL

SURFACE TREATMENT TO IMPROVE CCTBA BASED CVD CO NUCLEATION ON DIELE...

COBALT SUBSTRATE PROCESSING SYSTEMS, APPARATUS, AND METHODS

COBALT REMOVAL FOR CHAMBER CLEAN OR PRE-CLEAN PROCESS

METHOD OF ENABLING SEAMLESS COBALT GAP-FILL