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Yongin-City, KR
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last 30 patents
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Patent Grant
Gapfill improvement with low etch rate dielectric liners
Patent number
7,910,491
Issue date
Mar 22, 2011
Applied Materials, Inc.
Young Soo Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for etching tungsten silicide overlying polysilicon particu...
Patent number
7,754,610
Issue date
Jul 13, 2010
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of etching silicon nitride spacers with high selectivity rel...
Patent number
6,756,313
Issue date
Jun 29, 2004
Jinhan Choi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
GAPFILL IMPROVEMENT WITH LOW ETCH RATE DIELECTRIC LINERS
Publication number
20100099236
Publication date
Apr 22, 2010
Applied Materials, Inc.
Young Soo Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for etching tungsten silicide overlying polysilicon particu...
Publication number
20070281477
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process including silo-chloro passivation for etching tungsten sili...
Publication number
20070281479
Publication date
Dec 6, 2007
Applied Materials, Inc.
Kyeong-Tae Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of etching silicon nitride spacers with high selectivity rel...
Publication number
20030207585
Publication date
Nov 6, 2003
APPLIED MATERIALS, INC.
Jinhan Choi
H01 - BASIC ELECTRIC ELEMENTS