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Biju Ninan
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Cupertino, CA, US
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last 30 patents
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Patent Application
Triangular Scanning Magnet in Sputtering Tool Moving Over Larger Tr...
Publication number
20120024694
Publication date
Feb 2, 2012
TANGO SYSTEMS, INC.
Ravi Mullapudi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sputtering Chamber Having ICP Coil and Targets on Top Wall
Publication number
20100078312
Publication date
Apr 1, 2010
TANGO SYSTEMS, INC.
Ravi Mullapudi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Confining Magnets In Sputtering Chamber
Publication number
20100080928
Publication date
Apr 1, 2010
TANGO SYSTEMS, INC.
Ravi Mullapudi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...