Bill Oliver

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Phoenix, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Method for characterizing the performance of an electrostatic chuck
- Patent number 6,853,953
- Issue date Feb 8, 2005
- Tokyo Electron Limited
- Jozef Brcka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method for characterizing the performance of an electrostatic chuck
- Publication number 20030033116
- Publication date Feb 13, 2003
- Tokyo Electron Limited of TBS Broadcast Center
- Jozef Brcka
- H01 - BASIC ELECTRIC ELEMENTS