Biming Yen

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods of sputtering a protective coating on a semiconductor subst...
- Patent number 7,601,246
- Issue date Oct 13, 2009
- Lam Research Corporation
- Jisoo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...