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last 30 patents
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Patent Grant
Substrate processing chamber having heated showerhead assembly
Patent number
11,598,003
Issue date
Mar 7, 2023
Applied Materials, Inc.
Faruk Gungor
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PROCESS CHAMBER VACUUM SEAL LEAKAGE REDUCTION
Publication number
20240344608
Publication date
Oct 17, 2024
Applied Materials, Inc.
Shashidhara Patel H B
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
METHODS OF PREVENTING METAL CONTAMINATION BY CERAMIC HEATER
Publication number
20230313378
Publication date
Oct 5, 2023
Applied Materials, Inc.
Yongjing Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Gas Distribution Apparatuses
Publication number
20230193463
Publication date
Jun 22, 2023
Applied Materials, Inc.
Shashidhara Patel H B
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHODS FOR GAS PHASE PARTICLE REDUCTION
Publication number
20220064785
Publication date
Mar 3, 2022
Applied Materials, Inc.
Muhannad MUSTAFA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
Publication number
20190078210
Publication date
Mar 14, 2019
FARUK GUNGOR
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...